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产品名称:纳米位移台

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产品特点:nm级灵敏度.1um级定位精度.压电陶瓷和机械式组合结构.适合高精密位移控制需求.

纳米位移台的详细资料:

 纳米位移台

A.组装后效果及参数
 
·        
XYZ travel: 12x12x12 mm
·         Cryogenic + Non-magnetic
·         Load, max: 2 kg
 
 
B,单轴参数
Precision Piezo Stage PPS-20
The PPS-20 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 20 N (horizontal orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high speed (> 2 mm/s) and high blocking force (> 2 N). The PPS-20 is available in open loop or with an external encoder. Closed-loop resolution of 2 nm is achievable. Versions capable of operation in vacuum (10-9 mbar) and/or cryo (4 Kelvin) are available. The PPS-20 is compatible with the MMC-100 and MMC-110 controllers.

Key features
·         Travel: 12 - 51 mm
·         Load, max: 2 kg
·         Speed, max: 2 mm/s
·         Resolution, typical: 2 nm
·         Repeatability, bi-directional: ± 20 nm
·         Repeatability, uni-directional: 20 nm
·         Encoder Options: Analog, Digital

  

Travel Dependent Specifications
Travel range [mm]
12
18
26
38
51
Straightness/Flatness [µm]
± 1
± 1.5
± 1.5
± 2
± 2.5
Pitch [µrad]
± 60
± 80
± 80
± 90
± 100
Yaw [µrad]
± 70
± 90
± 90
± 100
± 100
Weight [g]
17
24
34
51
68

 

Motor Compatibility
Motor option
Piezo Motor, PM-002
Speed, max [mm/s]
2 (MMC-100), 10 (MMC-110)

 

Motor/Feedback Dependent Specifcations
Encoder option
None (open loop)
Analog (1 Vpp)
Digital (RS-422)
Resolution, typical [nm]
1
10
2
Repeatability, bi-directional [nm]
n/a
± 50
± 20
Repeatability, uni-directional [nm]
n/a
50
20
Accuracy [µm]
-
± 1
± 1

 

Load Characteristics
Fx [N]
Fy [N]
Fz [N]
Mx [N·m]
My [N·m]
Mz [N·m]
Load, max
2
20
20
0.7
0.7
0.7

 
C, 控制器

·         Driver for stick-slip, multi-phase piezo stages
·         Open loop resolution down to 1 nm
·         Closed loop resolution down to 2 nm
·         MMD-100 and MMC modules can be mixed in a stack
·         Pulse and direction input signals via mini-DIN connector

 
 
生产厂商: 美国MICRONIX

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